86-769-85611172
The Fourth Industry Zone, Yanwu Village, Dalingshan Town, Dongguan, Guangdong, China
Dimension | Φ 1100× H1000mm | Φ 1250× H1500mm | Φ 1600× H1800mm | Φ 1800× H1800mm |
main configuration | 10 multi-arc targets | 12 multi-arc targets | 20 multi-arc targets | 22 multi-arc targets |
power source | Electric-arc power, Filament power, Pulsed bias power supply | |||
Process gas control | Mass flowmeter+Electromagnetic ceramic valve | |||
Vacuum chamber structure | Vertical side opening door, pump system postposition, double water cooling | |||
Vacuum system | Molecule pump+Root pump+Mechanical pump(8.0*10-5Pa) Diffusion pump+Root pump+Mechanical pump(8.0*10-4Pa) | |||
Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating | |||
Workpiece motion mode | Public rotation frequency control: 0-20 rotation per minute | |||
Measure mode | Number display comosite vacuum gause: from atmosphere to 1.0*10-5Pa | |||
Control mode | Manual/Automatic/PC/PLC+HMI/PC four choice of control mode | |||
Remark | we can design the dimension of the vacuum equipment according to customer' s special technique requirement. |